发明授权
- 专利标题: Angular rate sensor
- 专利标题(中): 角速度传感器
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申请号: US09890458申请日: 2001-10-09
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公开(公告)号: US06523410B2公开(公告)日: 2003-02-25
- 发明人: Katsunori Matsubara , Masakazu Hatanaka , Satoshi Ouchi , Junichi Yukawa
- 申请人: Katsunori Matsubara , Masakazu Hatanaka , Satoshi Ouchi , Junichi Yukawa
- 优先权: JP11-354304 19991214
- 主分类号: G01P900
- IPC分类号: G01P900
摘要:
An object of the present invention is to improve the efficiency of a driving operation of an angular rate sensor employing a tuning fork oscillator made of single crystalline piezoelectric material such as quartz. In order to achieve the object of the present invention, a tuning fork oscillator assembled directly has driver electrodes and detector electrodes provided on a first main surface, a second main surface, an outer surface, and an inner surface of a arm, respectively. The oscillator also has a driver electrode, a monitor electrode, and detector electrodes provided on a first main surface, a second main surface, an inner surface, and an outer surface of the other arm thereof, respectively. A driving voltage is supplied from a driving power source so that the two driver electrodes may be equal in the polarity while the polarity of the driver electrode is opposite to that of the driver electrodes.
公开/授权文献
- US20020134156A1 Angular rate sensor 公开/授权日:2002-09-26
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