Invention Grant
- Patent Title: High pressure piezoresistive transducer suitable for use in hostile environments and method for making the same
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Application No.: US09922621Application Date: 2001-08-06
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Publication No.: US06523415B2Publication Date: 2003-02-25
- Inventor: Anthony D. Kurtz , Andrew Bemis , Timothy Nunn , Joseph Van De Weert
- Applicant: Anthony D. Kurtz , Andrew Bemis , Timothy Nunn , Joseph Van De Weert
- Main IPC: G01L906
- IPC: G01L906

Abstract:
A pressure transducer including: a silicon substrate including: a first surface adapted for receiving a pressure applied thereto, an oppositely disposed second surface, and a flexing portion adapted to deflect when pressure is applied to the first surface; at least a first sensor formed on the second surface and adjacent to a center of the flexing portion, and adapted to measure the pressure applied to the first surface; at least a second gauge sensor formed on the second surface and adjacent to a periphery of the flexing portion, and adapted to measure the pressure applied to the first surface; a glass substrate secured to the second surface of the silicon wafer.
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