Apparatus and process for supplying gas
Abstract:
There is provided a gas supplying apparatus capable of rapidly switching the gas to be supplied to an instrument and preventing reactive gases from mixing each other. The gas supplying apparatus comprises: a 4-way block valve which is a main switching valve 10, having two inflow ports 11, 12 and two outflow ports 13, 14; an instrument connection passage 1 connected to an instrument, such as an analyzer, to which the outflow ports 13 is connected; an exhaust passage 4 to which the two outflow ports 14 is connected; common gas supplying passages 2, 3 respectively connected to the two inflow ports 11, 12 of the 4-way block valve; a switching valve(s) 20 made of a 2-connected 3-way block valve(s) or a 4-way block valve(s) connected to the at least one of the two common gas supplying passages 2, 3; and two gas supplying passages 21, 22 switchably connected the 2-connected 3-way block valve(s) or the 4-way block valve(s).
Public/Granted literature
Information query
Patent Agency Ranking
0/0