发明授权
- 专利标题: Polymer, resist composition and patterning process
- 专利标题(中): 聚合物,抗蚀剂组合物和图案化工艺
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申请号: US09711311申请日: 2000-11-14
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公开(公告)号: US06524765B1公开(公告)日: 2003-02-25
- 发明人: Tsunehiro Nishi , Takeru Watanabe , Jun Hatakeyama , Takeshi Kinsho , Koji Hasegawa , Seiichiro Tachibana
- 申请人: Tsunehiro Nishi , Takeru Watanabe , Jun Hatakeyama , Takeshi Kinsho , Koji Hasegawa , Seiichiro Tachibana
- 优先权: JP11-324702 19991115
- 主分类号: G03F720
- IPC分类号: G03F720
摘要:
A polymer comprising units of formula (1-1) or (1-2) and having a weight average molecular weight of 1,000 to 500,000 is provided. R1 is an acid labile group, R2 is H or straight or branched C1-4 alkyl, Z is a tetravalent C2-10 hydrocarbon group, and k=0 or 1. A resist composition comprising the polymer as a base resin has significantly improved sensitivity, resolution and etching resistance and is very useful in microfabrication.
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