发明授权
US06527813B1 Ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head 失效
喷墨头基板,喷墨头,喷墨装置和喷墨记录头的制造方法

Ink jet head substrate, an ink jet head, an ink jet apparatus, and a method for manufacturing an ink jet recording head
摘要:
A substrate for use in an ink jet recording head is provided with a plurality of heat generating members for generating thermal energy to be utilized for discharging ink. The heat generating members are structured by a thin film formed by material represented by Tax Siy Rz, which has a specific resistance value of 4000 &mgr;&OHgr;·cm or less, where R is one or more kinds of elements selected from/among C, O, N, and x+y+z=100. With the structure thus arranged, the heat generating members make it possible to maintain the change of resistance values within a small amount even when used continuously for a long time, and provide recorded images of high quality with long life and reliability.
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