发明授权
US06528927B1 Piezo actuator with multi-layer conductive film, and method for making same
有权
具有多层导电膜的压电致动器及其制造方法
- 专利标题: Piezo actuator with multi-layer conductive film, and method for making same
- 专利标题(中): 具有多层导电膜的压电致动器及其制造方法
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申请号: US09606750申请日: 2000-06-29
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公开(公告)号: US06528927B1公开(公告)日: 2003-03-04
- 发明人: Carsten Schuh , Karl Lubitz , Dieter Cramer , Thorsten Steinkopff , Iris Hahn , Andreas Wolff , Clemens Scherer
- 申请人: Carsten Schuh , Karl Lubitz , Dieter Cramer , Thorsten Steinkopff , Iris Hahn , Andreas Wolff , Clemens Scherer
- 优先权: DE19929687 19990629
- 主分类号: H01L4108
- IPC分类号: H01L4108
摘要:
A piezo actuator with an actuator body has at least one electrically conductive multi-layer film with a rigid electrical terminal element. The multi-layer film controls expansion and attraction of the actuator body. An electrical conduction layer of the multi-layer film has at least one recess to increase flexibility. The recesses in the conduction layer are, for example, photolitho-graphically produced.
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