发明授权
US06528927B1 Piezo actuator with multi-layer conductive film, and method for making same 有权
具有多层导电膜的压电致动器及其制造方法

Piezo actuator with multi-layer conductive film, and method for making same
摘要:
A piezo actuator with an actuator body has at least one electrically conductive multi-layer film with a rigid electrical terminal element. The multi-layer film controls expansion and attraction of the actuator body. An electrical conduction layer of the multi-layer film has at least one recess to increase flexibility. The recesses in the conduction layer are, for example, photolitho-graphically produced.
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