发明授权
- 专利标题: Inspection data analyzing system
- 专利标题(中): 检验数据分析系统
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申请号: US09893889申请日: 2001-06-29
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公开(公告)号: US06529619B2公开(公告)日: 2003-03-04
- 发明人: Seiji Ishikawa , Masao Sakata , Jun Nakazato , Sadao Shimoyashiro , Hiroto Nagatomo , Yuzo Taniguchi , Osamu Satou , Tsutomu Okabe , Yuzaburo Sakamoto , Kimio Muramatsu , Kazuhiko Matsuoka , Taizo Hashimoto , Yuichi Ohyama , Yutaka Ebara , Isao Miyazaki , Shuichi Hanashima
- 申请人: Seiji Ishikawa , Masao Sakata , Jun Nakazato , Sadao Shimoyashiro , Hiroto Nagatomo , Yuzo Taniguchi , Osamu Satou , Tsutomu Okabe , Yuzaburo Sakamoto , Kimio Muramatsu , Kazuhiko Matsuoka , Taizo Hashimoto , Yuichi Ohyama , Yutaka Ebara , Isao Miyazaki , Shuichi Hanashima
- 优先权: JP1-177934 19890712
- 主分类号: G06K900
- IPC分类号: G06K900
摘要:
The present invention provides data analysis stations respectively for a probing tester and an automatic particle inspection machine. And in the data analysis station, the coordinates on which the disposition of the chips are described on a product basis are equal to those on which the locations of the defects are described. Further, the station provides a function of determining which of the chips each defect belongs to. These data analysis stations are connected through a communication line. The present invention is capable of analyzing the data on a chip basis, resulting in being able to grasp the relation between how the defects are caused on each chip and the product character of the chip.
公开/授权文献
- US20010038708A1 Inspection data analyzing system 公开/授权日:2001-11-08