发明授权
US06530267B2 Scanning system having a deflectable probe tip 失效
扫描系统具有可偏转的探针尖端

  • 专利标题: Scanning system having a deflectable probe tip
  • 专利标题(中): 扫描系统具有可偏转的探针尖端
  • 申请号: US09769255
    申请日: 2001-01-26
  • 公开(公告)号: US06530267B2
    公开(公告)日: 2003-03-11
  • 发明人: Klaus Knupfer
  • 申请人: Klaus Knupfer
  • 优先权: DE10003693 20000128
  • 主分类号: G01B528
  • IPC分类号: G01B528
Scanning system having a deflectable probe tip
摘要:
The invention is directed to a scanning system having one or several deflectable probe tips which are excited to oscillation at or near their resonant frequency. A saturation amplifier (16) is provided for detecting and measuring the phase shift between the excitation signal and the oscillation carried out by the probe tip. The saturation amplifier (16) generates a rectangular signal from the incoming sinusoidally-shaped signal (3e) while exactly maintaining the time-dependent position of the zero crossovers of the signal. The detection system, which is required for each probe tip, thereby acquires a very simple configuration of few commercially available components. Saturation amplified rectangular signals exclusively form the basis for the further evaluation. For this reason, a substantial independence of the signal intensity of the oscillation signal is ensured.
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