发明授权
- 专利标题: Ink jet recording head, substrate for this head, manufacturing method of this substrate and ink jet recording apparatus
- 专利标题(中): 喷墨记录头,该头基板,该基板的制造方法和喷墨记录装置
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申请号: US09210800申请日: 1998-12-15
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公开(公告)号: US06532027B2公开(公告)日: 2003-03-11
- 发明人: Teruo Ozaki , Masahiko Ogawa , Tomoyuki Hiroki , Muga Mochizuki
- 申请人: Teruo Ozaki , Masahiko Ogawa , Tomoyuki Hiroki , Muga Mochizuki
- 优先权: JP9-349335 19971218
- 主分类号: B41J205
- IPC分类号: B41J205
摘要:
An ink jet recording head in which a heating resistor forming a heating portion, a wiring electrically connected to the heating resistor, and a protective film formed on the heating resistor and the wiring to protect the heating resistor and the wiring are arranged on a substrate for the ink jet recording head. An ink path in communication with a discharging port for discharging ink is also formed on the substrate for the ink jet recording head. The protective film includes a first protective film layer for covering the heating resistor and the wiring, a second protective film layer formed on the first protective film layer by a material different from that of the first protective film layer and having an opening in a portion corresponding to the heating portion of the heating resistor, and a third protective film layer constructed of the same material system as the first protective film layer and covering the second protective film layer and the portion of the first protective film layer that is exposed through the opening. The second protective film layer is constructed of an inorganic material.
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