- 专利标题: Method for fabricating a memory cell configuration
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申请号: US10005978申请日: 2001-12-03
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公开(公告)号: US06534362B2公开(公告)日: 2003-03-18
- 发明人: Hans Reisinger
- 申请人: Hans Reisinger
- 优先权: DE19812948 19980324
- 主分类号: H01L21336
- IPC分类号: H01L21336
摘要:
A method for fabricating a memory cell configuration, which includes the steps of etching isolation trenches into a semiconductor substrate and thereby forming webs between the isolation trenches and producing bit lines after channel regions have been produced. It furthermore includes performing an etching step which results in the isolation trenches penetrating more deeply into the semiconductor substrate.
公开/授权文献
- US20020055247A1 Method for fabricating a memory cell configuration 公开/授权日:2002-05-09
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