• 专利标题: Method for fabricating a memory cell configuration
  • 申请号: US10005978
    申请日: 2001-12-03
  • 公开(公告)号: US06534362B2
    公开(公告)日: 2003-03-18
  • 发明人: Hans Reisinger
  • 申请人: Hans Reisinger
  • 优先权: DE19812948 19980324
  • 主分类号: H01L21336
  • IPC分类号: H01L21336
Method for fabricating a memory cell configuration
摘要:
A method for fabricating a memory cell configuration, which includes the steps of etching isolation trenches into a semiconductor substrate and thereby forming webs between the isolation trenches and producing bit lines after channel regions have been produced. It furthermore includes performing an etching step which results in the isolation trenches penetrating more deeply into the semiconductor substrate.
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