• 专利标题: Piezoelectric/electrostrictive device and method of manufacturing same
  • 申请号: US09613536
    申请日: 2000-07-10
  • 公开(公告)号: US06538362B1
    公开(公告)日: 2003-03-25
  • 发明人: Yukihisa TakeuchiTsutomu NanatakiKoji Kimura
  • 申请人: Yukihisa TakeuchiTsutomu NanatakiKoji Kimura
  • 优先权: JP11-281522 19991001; JP11-307844 19991028; JP11-371967 19991227; JP11-326195 19991116; JP12-013576 20000121; JP12-015123 20000124; JP12-056434 20000301; JP12-133004 20000501
  • 主分类号: H01L4108
  • IPC分类号: H01L4108
Piezoelectric/electrostrictive device and method of manufacturing same
摘要:
A piezoelectric/electrostrictive device comprises a pair of mutually opposing thin plate sections, a movable section, and a fixation section for supporting the thin plate sections and the movable section. Piezoelectric/electrostrictive elements are arranged on the pair of thin plate sections. A hole is formed by the inner walls of the pair of thin plate sections, an inner wall of the movable section, and an inner wall of the fixation section. A through-hole having a rectangular cross section is formed over a range from a forward end surface of the movable section to the hole to realize a light weight of the movable section.
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