Invention Grant
- Patent Title: Optically aligning a loadport on a process machine by transmitting light through a system of apertures
- Patent Title (中): 通过将光通过孔径系统透射光学对准加工机器上的载荷
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Application No.: US09837814Application Date: 2001-04-18
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Publication No.: US06541787B2Publication Date: 2003-04-01
- Inventor: Andrew Lin , Yi-Yu Liu , Tung-Gan Cheng , Tung-Liang Wu , Hsueh-Cheng Lin , Yaw-Wen Wu , Chia-Fu Tsai
- Applicant: Andrew Lin , Yi-Yu Liu , Tung-Gan Cheng , Tung-Liang Wu , Hsueh-Cheng Lin , Yaw-Wen Wu , Chia-Fu Tsai
- Main IPC: G01N2186
- IPC: G01N2186

Abstract:
An apparatus and a method for aligning a loadport on a process machine are disclosed. The apparatus is constructed by a base plate, an alignment block mounted on the base plate, a light source and an optical detector. The alignment block is provided with an aperture extending longitudinally through the block, or formed in a T-shape extending both longitudinally and transversely through the block. The light source may be suitably a laser emission source, or a laser source that operates in a pulse mode. The diameter of the aperture provided in the alignment block should be sufficiently small, i.e. smaller than 5 mm, and preferably smaller than 3 mm.
Public/Granted literature
- US20020155641A1 Apparatus and method for aligning a loadport Public/Granted day:2002-10-24
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