Invention Grant
US06541787B2 Optically aligning a loadport on a process machine by transmitting light through a system of apertures 有权
通过将光通过孔径系统透射光学对准加工机器上的载荷

Optically aligning a loadport on a process machine by transmitting light through a system of apertures
Abstract:
An apparatus and a method for aligning a loadport on a process machine are disclosed. The apparatus is constructed by a base plate, an alignment block mounted on the base plate, a light source and an optical detector. The alignment block is provided with an aperture extending longitudinally through the block, or formed in a T-shape extending both longitudinally and transversely through the block. The light source may be suitably a laser emission source, or a laser source that operates in a pulse mode. The diameter of the aperture provided in the alignment block should be sufficiently small, i.e. smaller than 5 mm, and preferably smaller than 3 mm.
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