• 专利标题: Plastic package for micromechanical devices
  • 申请号: US09766197
    申请日: 2001-01-19
  • 公开(公告)号: US06541832B2
    公开(公告)日: 2003-04-01
  • 发明人: Anthony L. Coyle
  • 申请人: Anthony L. Coyle
  • 主分类号: H01L2978
  • IPC分类号: H01L2978
Plastic package for micromechanical devices
摘要:
Low-cost plastic cavity-up land-grid array packages and ball-grid array packages are provided, suitable for wire-bonded chips having micromechanical components. The packages feature a thermal heat spreader and a protective lid. The package structure disclosed is flexible with regard to materials and geometrical detail, and provides solutions to specific functions such as storage space for chemical compounds within the enclosed cavity of the package.
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