- 专利标题: Plastic package for micromechanical devices
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申请号: US09766197申请日: 2001-01-19
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公开(公告)号: US06541832B2公开(公告)日: 2003-04-01
- 发明人: Anthony L. Coyle
- 申请人: Anthony L. Coyle
- 主分类号: H01L2978
- IPC分类号: H01L2978
摘要:
Low-cost plastic cavity-up land-grid array packages and ball-grid array packages are provided, suitable for wire-bonded chips having micromechanical components. The packages feature a thermal heat spreader and a protective lid. The package structure disclosed is flexible with regard to materials and geometrical detail, and provides solutions to specific functions such as storage space for chemical compounds within the enclosed cavity of the package.
公开/授权文献
- US20020000630A1 Plastic package for micromechanical devices 公开/授权日:2002-01-03
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