发明授权
- 专利标题: Wafer carrier
- 专利标题(中): 晶圆载体
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申请号: US09658362申请日: 2000-09-08
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公开(公告)号: US06544033B1公开(公告)日: 2003-04-08
- 发明人: Lance A. Scudder , Lori Washington , Lori A. Callaghan , Bradley M. Curelop
- 申请人: Lance A. Scudder , Lori Washington , Lori A. Callaghan , Bradley M. Curelop
- 主分类号: F27D1900
- IPC分类号: F27D1900
摘要:
Provided herein is a wafer carrier comprising a disk and a pocket, wherein the pocket is centered in the disk and holds a wafer. Also provided is a method of processing or testing a wafer for a semiconductor device, comprising the steps of placing the wafer in the wafer carrier disclosed herein; loading the wafer carrier in a loadlock chamber; and transferring the wafer carrier from the loadlock chamber to a process chamber for processing or testing.