- 专利标题: Plasma enhanced chemical deposition of conjugated polymer
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申请号: US09811871申请日: 2001-03-19
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公开(公告)号: US06544600B2公开(公告)日: 2003-04-08
- 发明人: John D. Affinito , Gordon L. Graff , Mark E. Gross
- 申请人: John D. Affinito , Gordon L. Graff , Mark E. Gross
- 主分类号: C23C16505
- IPC分类号: C23C16505
摘要:
A method for making conjugated polymers. The method includes flash evaporating a conjugated material forming an evaporate, passing the evaporate to a glow discharge electrode creating a glow discharge conjugated material plasma from the evaporate, and cryocondensing the glow discharge conjugated polymer precursor plasma on a substrate as a condensate and crosslinking the condensate thereon, the crosslinking resulting from radicals created in the glow discharge conjugated material plasma.
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