发明授权
- 专利标题: Substrate container and method of dehumidifying substrate container
- 专利标题(中): 底物容器及基体容器除湿方法
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申请号: US09769308申请日: 2001-01-26
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公开(公告)号: US06547953B2公开(公告)日: 2003-04-15
- 发明人: Yoko Suzuki , Akira Tanaka , Kazuo Okubo
- 申请人: Yoko Suzuki , Akira Tanaka , Kazuo Okubo
- 优先权: JP2000-019734 20000128; JP2000-245060 20000811
- 主分类号: B01D5326
- IPC分类号: B01D5326
摘要:
A substrate container includes a container housing having an opening for storing a substrate therethrough and a cover sealingly covering the opening, a fan motor mounted in the container housing for producing a circulating path of air in contact with the substrate in the container housing, and a particle removing filter and a gaseous impurity trapping filter which are disposed in the a portion of the circulating path which extends toward the substrate. A dehumidifying unit for dehumidifying a space in the container housing comprises a solid polymer electrolyte film disposed in the circulating path and voltage applying means for applying a voltage to the solid polymer electrolyte film to decompose water in air flowing in the circulating path thereby to dehumidify a space in the container housing.