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US06548355B2 EEPROM memory cell and corresponding manufacturing method 有权
EEPROM存储单元及相应的制造方法

  • Patent Title: EEPROM memory cell and corresponding manufacturing method
  • Patent Title (中): EEPROM存储单元及相应的制造方法
  • Application No.: US09760069
    Application Date: 2001-01-11
  • Publication No.: US06548355B2
    Publication Date: 2003-04-15
  • Inventor: Federico Pio
  • Applicant: Federico Pio
  • Priority: EP98830390 19980630
  • Main IPC: H01L21336
  • IPC: H01L21336
EEPROM memory cell and corresponding manufacturing method
Abstract:
An EEPROM memory cell integrated in a semiconductor substrate comprises a floating gate MOS transistor having a source region, a drain region, and a gate region projecting from the substrate and is isolated from the substrate by an oxide layer including a thinner tunnel portion and heavily doped regions formed under said tunnel portion and extending to beneath the drain region, and a selection transistor having a source region, a drain region and a gate region, wherein said source region is heavily doped and formed simultaneously with said heavily doped regions.
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