发明授权
- 专利标题: Optical switch
- 专利标题(中): 光开关
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申请号: US10104692申请日: 2002-03-21
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公开(公告)号: US06552839B1公开(公告)日: 2003-04-22
- 发明人: Yoon Shik Hong , Joon Seok Kang , Sang Kee Yoon , Sung Cheon Jung , Jung Hyun Lee , Hyun Kee Lee
- 申请人: Yoon Shik Hong , Joon Seok Kang , Sang Kee Yoon , Sung Cheon Jung , Jung Hyun Lee , Hyun Kee Lee
- 优先权: KR2001-0077186 20011207
- 主分类号: G02B2600
- IPC分类号: G02B2600
摘要:
Disclosed herein is an optical switch. The optical switch includes an electrostatic actuator and a substrate. The electrostatic actuator includes an electrostatic actuator, the electrostatic actuator comprising, a reciprocating mass located in the center of the electrostatic actuator, first rotating axes located symmetrically at the left and right sides of the reciprocating mass, first rotating masses rotatably connected to the first rotating axes, first rotating springs for supporting the first rotating masses, linear springs connected to the first rotating masses, second rotating masses connected to the linear springs, second rotating springs for supporting the second rotating masses, second rotating axes connected to the second rotating masses, structural anchors at the side ends of the actuator, drive electrodes, and a micro mirror movable by the same displacement as the reciprocating mass.
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