发明授权
- 专利标题: Dry screw vaccum pump having nitrogen injection
- 专利标题(中): 具有氮气注入的干式真空泵
-
申请号: US10001018申请日: 2001-11-02
-
公开(公告)号: US06554593B2公开(公告)日: 2003-04-29
- 发明人: Masaru Mito , Masashi Yoshimura , Masaaki Takahashi
- 申请人: Masaru Mito , Masashi Yoshimura , Masaaki Takahashi
- 优先权: JP10-74228 19980323; JP10-93220 19980406; JP10-93221 19980406
- 主分类号: F04C1816
- IPC分类号: F04C1816
摘要:
A dry vacuum pump assembly that includes a casting having an inner chamber, an inlet and an outlet communicating with the inner chamber, a pair of right and left handed screw rotors positioned in the casing, each screw rotor having a cross section formed by a Quimby curve, a circular arc, and a quasi-Archimedean spiral curve, the pair of screw rotors intermeshing with each other to pump a process gas pumped from the inlet to the outlet. The pump assembly further includes a nitrogen-supplying tube that communicates with the inner chamber at a position near the outlet in the casing, and an external pipe that connects the outlet to a scrubber or a trap which external pipe is straight and does not include a silencer.
公开/授权文献
- US20020131884A1 Dry vacuum pump 公开/授权日:2002-09-19
信息查询