发明授权
US06556364B2 Apparatus, system, and method for precision positioning and alignment of a lens in an optical system
有权
用于光学系统中的透镜的精确定位和对准的装置,系统和方法
- 专利标题: Apparatus, system, and method for precision positioning and alignment of a lens in an optical system
- 专利标题(中): 用于光学系统中的透镜的精确定位和对准的装置,系统和方法
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申请号: US09841108申请日: 2001-04-25
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公开(公告)号: US06556364B2公开(公告)日: 2003-04-29
- 发明人: Michael F. Meehan , David G. Taub , Daniel N. Galburt
- 申请人: Michael F. Meehan , David G. Taub , Daniel N. Galburt
- 主分类号: G02B702
- IPC分类号: G02B702
摘要:
An apparatus, system, and method for precision positioning and alignment of a lens in an optical system, wherein a first support for coupling to the peripheral edge of the lens is connected to a concentric second support using a plurality of positioning devices. At least one positioning device is configured to move the first support in an axial direction relative to the second support. Each positioning device comprises a lever, an actuator, and a flexure. The lever has a pivot point and is mounted on the second support. The actuator is connected to the lever and used to operate the lever about its pivot point. The flexure has a first end connected to the lever between the actuator and the pivot point. A second end of the flexure is connected to the first support. A second positioning device is used to move the first support relative to the second support in a direction substantially perpendicular to the axial direction. Additional positioning devices can be used to provide for other types of motion such as, for example, rotation and tilt. In a preferred embodiment, the actuators are pneumatic bellows. A compressible gas supply module is fluidly connected to the bellows, and a control module in communication with the compressible gas supply module is used to operate the bellows. An optional sensor module is used to provide data to the control module for positioning the first support relative to the second support.
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