发明授权
- 专利标题: Relation to the manufacture of masks and electronic parts
- 专利标题(中): 与面罩和电子零件的制造有关
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申请号: US09658548申请日: 2000-09-09
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公开(公告)号: US06558872B1公开(公告)日: 2003-05-06
- 发明人: Kevin Barry Ray , Anthony Paul Kitson , Eduard Kottmair , Hans-Horst Glatt , Stefan Hilgart
- 申请人: Kevin Barry Ray , Anthony Paul Kitson , Eduard Kottmair , Hans-Horst Glatt , Stefan Hilgart
- 主分类号: G03C152
- IPC分类号: G03C152
摘要:
Imagable precursors for masks and for electronic parts comprise a polymeric layer applied to a substrate. The layer comprises at least one polymer having infra-red absorbing groups carried as pendent groups on the polymer backbone. Certain infra-red absorbing groups may also act to insolubilize the polymer in a developer, until it is imagewise exposed to infra-red radiation. Imagewise application of heat, resulting from imagewise exposure of the precursor to infra-red radiation, renders the polymer layer more soluble in the developer than prior to exposure to the infra-red radiation.
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