发明授权
US06559017B1 Method of using amorphous carbon as spacer material in a disposable spacer process
有权
在一次性间隔物工艺中使用无定形碳作为隔离材料的方法
- 专利标题： Method of using amorphous carbon as spacer material in a disposable spacer process
- 专利标题（中）： 在一次性间隔物工艺中使用无定形碳作为隔离材料的方法
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申请号： US10170909申请日： 2002-06-13
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公开(公告)号： US06559017B1公开(公告)日： 2003-05-06
- 发明人: David E. Brown , Philip A. Fisher , Richard J. Huang , Richard C. Nguyen , Cyrus E. Tabery
- 申请人： David E. Brown , Philip A. Fisher , Richard J. Huang , Richard C. Nguyen , Cyrus E. Tabery
- 主分类号： H01L21336
- IPC分类号： H01L21336
摘要：
A method of using amorphous carbon as spacer material in a disposable spacer process can include forming amorphous carbon spacers at lateral side walls of a gate structure over a substrate, implanting dopants in the substrate to form source and drain regions, ashing away the amorphous carbon spacers, and implanting dopants to form shallow structures in the substrate.
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