发明授权
- 专利标题： Ion beam generation apparatus
- 专利标题（中）： 离子束发生装置
-
申请号： US09763546申请日： 2001-05-29
-
公开(公告)号： US06559454B1公开(公告)日： 2003-05-06
- 发明人: Adrian John Murrell , Erik Jan Hilda Collart , Bernard Francis Harrison , Amir Al-Bayati , Chris James Burgess , David Armour , Andrew Holmes , Simon Povall , Drew Arnold , Paul Anthony Burfield
- 申请人： Adrian John Murrell , Erik Jan Hilda Collart , Bernard Francis Harrison , Amir Al-Bayati , Chris James Burgess , David Armour , Andrew Holmes , Simon Povall , Drew Arnold , Paul Anthony Burfield
- 主分类号： H01J3715
- IPC分类号： H01J3715
摘要：
An ion beam generation apparatus comprising an ion source (20) for generating ions, and a tetrode extraction assembly (11) comprising four electrodes for extracting and accelerating ions from the ion source. The extraction assembly comprises a source electrode (22) at the potential of the ion source, an extraction electrode (23) adjacent to the source electrode to extract ions from the ion source (20), a ground electrode (25), and a suppression electrode (24) between the extraction electrode and the ground electrode. Each electrode has an aperture to allow the ion beam to pass therethrough. The gap between the extraction (23) and suppression (24) electrodes is variable in the direction of ion beam travel.