Invention Grant
US06559581B2 Field emission arrays and row lines thereof 失效
场发射阵列及其行线

  • Patent Title: Field emission arrays and row lines thereof
  • Patent Title (中): 场发射阵列及其行线
  • Application No.: US10108973
    Application Date: 2002-03-28
  • Publication No.: US06559581B2
    Publication Date: 2003-05-06
  • Inventor: Ammar Derraa
  • Applicant: Ammar Derraa
  • Main IPC: H01J130
  • IPC: H01J130
Field emission arrays and row lines thereof
Abstract:
A method of fabricating row lines and pixel openings of a field emission array. The method employs only two masks. A first mask employed in the method includes apertures alignable between rows of pixels of the field emission array. Electrically conductive material and semiconductive material exposed through the apertures are removed to define the row lines of the field emission array. A passivation layer is then disposed over at least selected portions of the field emission array. Then a second mask, including apertures alignable over the pixel regions of the field emission array, is disposed over the passivation layer of the field emission array. Passivation material exposed through the apertures of the second mask is removed to define openings through the passivation layer and over the pixel regions of the field emission array. Conductive material exposed through the apertures of the second mask may then be removed to expose the underlying semiconductive grid and to further define the pixel openings.
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