发明授权
- 专利标题: Plasma vacuum pump
- 专利标题(中): 等离子真空泵
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申请号: US09869766申请日: 2001-07-02
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公开(公告)号: US06559601B1公开(公告)日: 2003-05-06
- 发明人: Wayne L. Johnson , Raphael A. Dandl , Gareth E. Guest
- 申请人: Wayne L. Johnson , Raphael A. Dandl , Gareth E. Guest
- 主分类号: F04B3702
- IPC分类号: F04B3702
摘要:
A plasma pump and method for pumping ions from a first to second region, the pump including a partition member having a through opening defining a plurality of conduits (30); a group of magnets (24) to provide magnetic forces that extend to the conduits; and a plurality of electric potential sources (14) for creating electrostatic fields which accelerate ions from the conduits to the second region.
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