发明授权
- 专利标题: Electrically tunable device and a method relating thereto
- 专利标题(中): 电可调谐装置及其相关方法
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申请号: US09885520申请日: 2001-06-20
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公开(公告)号: US06563153B2公开(公告)日: 2003-05-13
- 发明人: Erland Wikborg , Zdravko Ivanov , Peter Petrov , Spartak Gevorgian
- 申请人: Erland Wikborg , Zdravko Ivanov , Peter Petrov , Spartak Gevorgian
- 优先权: SE0002296 20000620
- 主分类号: H01L2976
- IPC分类号: H01L2976
摘要:
A thin film ferroelectric varactor device comprising a substrate layer, a ferroelectric layer structure and an electrode structure is presented. The ferroelectric layer structure comprises a number of ferroelectric layers and a number of intermediate buffer layers arranged in an alternating manner. At least a first and a second layer of the ferroelectric layers have different Curie temperatures, i.e. the dielectric constant of the first ferroelectric layer has a maximum at a temperature which is different from the temperature at which the dielectric constant of the second ferroelectric layer has a maximum.
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