发明授权
- 专利标题: Die seal for semiconductor device moisture protection
- 专利标题(中): 半导体器件防潮密封
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申请号: US09998624申请日: 2001-11-30
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公开(公告)号: US06566736B1公开(公告)日: 2003-05-20
- 发明人: Hiroyuki Ogawa , Yider Wu , Yu Sun
- 申请人: Hiroyuki Ogawa , Yider Wu , Yu Sun
- 主分类号: H01L23544
- IPC分类号: H01L23544
摘要:
Moisture seal apparatus and methodologies are disclosed for protecting semiconductor devices from moisture. An upper seal layer, such as SiN is formed over an upper insulator layer and an exposed portion of a die seal metal structure so as to form a vertical moisture seal between electrical components in the semiconductor device and the ambient environment. A lateral seal may be formed from the die seal metal structure in an upper metal layer in the device and one or more contacts extending downward from the die seal metal to the substrate or to a lower die seal metal structure.
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