发明授权
- 专利标题: Surface acoustic wave device
- 专利标题(中): 表面声波装置
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申请号: US09967978申请日: 2001-10-02
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公开(公告)号: US06566788B2公开(公告)日: 2003-05-20
- 发明人: Osamu Iwamoto , Koichi Morozumi , Yuji Mitsui
- 申请人: Osamu Iwamoto , Koichi Morozumi , Yuji Mitsui
- 优先权: JP10-314098 19981016
- 主分类号: H02L4108
- IPC分类号: H02L4108
摘要:
A surface acoustic wave device is provided having a substrate made of quartz, a pair of inter digital transducer-shaped electrodes made of an aluminum layer, an electrode pad, and a pair of lattice-shaped reflectors made of the same material as the electrode. The crystal structure of the aluminum layer composing the electrode is a twin crystal structure, where crystal grains of the (−1 1 1) plane and the (0 0 2) plane and crystal grains of the (1 −1 −1) plane and the (0 0 −2) plane are in a twin crystal relationship with the (−1 1 −1) plane and the (1 −1 1) plane of aluminum as the twin boundaries. Also, the {1 1 1} plane of the aluminum layer is oriented to an 8° inclination relative to the {0 1 0} plane of quartz composing the substrate.
公开/授权文献
- US20020017837A1 Surface acoustic wave device 公开/授权日:2002-02-14
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