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US06566788B2 Surface acoustic wave device 有权
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Surface acoustic wave device
摘要:
A surface acoustic wave device is provided having a substrate made of quartz, a pair of inter digital transducer-shaped electrodes made of an aluminum layer, an electrode pad, and a pair of lattice-shaped reflectors made of the same material as the electrode. The crystal structure of the aluminum layer composing the electrode is a twin crystal structure, where crystal grains of the (−1 1 1) plane and the (0 0 2) plane and crystal grains of the (1 −1 −1) plane and the (0 0 −2) plane are in a twin crystal relationship with the (−1 1 −1) plane and the (1 −1 1) plane of aluminum as the twin boundaries. Also, the {1 1 1} plane of the aluminum layer is oriented to an 8° inclination relative to the {0 1 0} plane of quartz composing the substrate.
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