Invention Grant
- Patent Title: Planar shape characteristic measuring apparatus and planar shape characteristic measuring method
- Patent Title (中): 平面形状特征测量装置和平面形状特征测量方法
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Application No.: US09860498Application Date: 2001-05-21
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Publication No.: US06568289B2Publication Date: 2003-05-27
- Inventor: Toshihiro Nakajima
- Applicant: Toshihiro Nakajima
- Priority: JP2000-157944 20000524
- Main IPC: G01B730
- IPC: G01B730

Abstract:
A planar shape characteristic measuring apparatus and method, which can precisely and efficiently measure the characteristics relating to a surface shape of the measured surface of a disk such as a data recording surface of an optical disk including a laser Doppler speed meter which detects a perpendicular direction speed of a measured surface of a rotating disk; a tilt angle calculating unit which calculates a tilt angle in the rotational direction of an optical disk at each measuring position to a reference surface based on a linear speed at each measuring position detected by the laser Doppler speed meter and the detected perpendicular direction speed; a displacement calculating unit which calculates a perpendicular direction displacement of the optical disk at each measuring position; an acceleration calculating unit which calculates a perpendicular direction acceleration; and a focus servo error calculating unit which calculates a focus servo error which is predicted to occur in a focus servo system.
Public/Granted literature
- US20020034151A1 Planar shape characteristic measuring apparatus and planar shape characteristic measuring method Public/Granted day:2002-03-21
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