发明授权
- 专利标题: Planar shape characteristic measuring apparatus and planar shape characteristic measuring method
- 专利标题(中): 平面形状特征测量装置和平面形状特征测量方法
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申请号: US09860498申请日: 2001-05-21
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公开(公告)号: US06568289B2公开(公告)日: 2003-05-27
- 发明人: Toshihiro Nakajima
- 申请人: Toshihiro Nakajima
- 优先权: JP2000-157944 20000524
- 主分类号: G01B730
- IPC分类号: G01B730
摘要:
A planar shape characteristic measuring apparatus and method, which can precisely and efficiently measure the characteristics relating to a surface shape of the measured surface of a disk such as a data recording surface of an optical disk including a laser Doppler speed meter which detects a perpendicular direction speed of a measured surface of a rotating disk; a tilt angle calculating unit which calculates a tilt angle in the rotational direction of an optical disk at each measuring position to a reference surface based on a linear speed at each measuring position detected by the laser Doppler speed meter and the detected perpendicular direction speed; a displacement calculating unit which calculates a perpendicular direction displacement of the optical disk at each measuring position; an acceleration calculating unit which calculates a perpendicular direction acceleration; and a focus servo error calculating unit which calculates a focus servo error which is predicted to occur in a focus servo system.
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