发明授权
- 专利标题: Method for cleaning glass substrate
- 专利标题(中): 玻璃基板清洗方法
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申请号: US09699339申请日: 2000-10-31
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公开(公告)号: US06568995B1公开(公告)日: 2003-05-27
- 发明人: Kazuishi Mitani , Yasuhiro Saito
- 申请人: Kazuishi Mitani , Yasuhiro Saito
- 优先权: JP11-328522 19991118; JP2000-202522 20000704
- 主分类号: B24B724
- IPC分类号: B24B724
摘要:
After a polishing process of polishing a glass substrate with an abrasive containing lanthanoid oxides, the glass substrate is subjected to the first and second washing processes. In the first washing process, the polished substrate is washed with a washing solution containing acid and a reducing agent, wherein the acid includes at least nitric acid. In the second washing process, the washed substrate is treated with an aqueous solution of an alkaline detergent. The substrate is suitable for a recording medium.