• Patent Title: Method of fabricating read only memory
  • Application No.: US09881819
    Application Date: 2001-06-15
  • Publication No.: US06569713B2
    Publication Date: 2003-05-27
  • Inventor: Chih-Ping Chen
  • Applicant: Chih-Ping Chen
  • Main IPC: H01L2182
  • IPC: H01L2182
Method of fabricating read only memory
Abstract:
A method of fabricating a read only memory. After forming bit lines and word lines in a substrate, a coding process is performed. A photoresist layer is formed on the substrate while performing the coding process. The photoresist layer covering a part of a first channel region under the word line is exposed, and then the photoresist layer covering a part of a second channel region under the word lines is exposed. A development step is performed to remove the photoresist layer that has been exposed. Using the remaining photoresist layer as a mask to perform an ion implantation, a coding area is formed in the first channel region and the second channel region. The photoresist layer is removed.
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