发明授权
- 专利标题: Semiconductor element and fabricating method thereof
- 专利标题(中): 半导体元件及其制造方法
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申请号: US09522820申请日: 2000-03-10
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公开(公告)号: US06569752B1公开(公告)日: 2003-05-27
- 发明人: Soichi Homma , Masahiro Miyata , Hirokazu Ezawa , Junichiro Yoshioka , Hiroaki Inoue , Tsuyoshi Tokuoka
- 申请人: Soichi Homma , Masahiro Miyata , Hirokazu Ezawa , Junichiro Yoshioka , Hiroaki Inoue , Tsuyoshi Tokuoka
- 优先权: JP11-065419 19990311
- 主分类号: H01L2144
- IPC分类号: H01L2144
摘要:
The present semiconductor element comprises a semiconductor substrate, a wiring pad formed thereon, a layer of barrier metal formed thereon, an intermetallic compound Ag3Sn formed thereon, and a protruded electrode consisting of low-melting metal formed thereon. In addition, a fabricating method of a semiconductor element comprises the steps of forming a wiring pad on a semiconductor substrate, forming a layer of barrier metal thereon, forming a metallic layer containing Ag thereon, forming a layer of low-melting metal containing Sn thereon, and melting the layer of low-melting metal containing Sn to form a protruded electrode and simultaneously to form an intermetallic compound Ag3Sn at an interface between the metallic layer containing Ag and the layer of low-melting metal containing Sn. Thus, with Pb-free solder, a semiconductor element of high reliability can be obtained.
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