A laser processing method includes the steps of irradiating a projection mask having a light transmitting area, for allowing a laser beam to be transmitted therethrough, with the laser beam; and irradiating a processing target with the laser beam transmitted through the light transmitting area. A spot of the laser beam on the projection mask is shaped so as to irradiate a portion in the vicinity of first edges of the light transmitting area, the first edges extending in one direction, and so as not to irradiate a portion in the vicinity of second edges of the light transmitting area, the second edges extending in a second direction which is different from the first direction.