Invention Grant
US06570197B2 Optical device having sensing TGTs and switching TFTs with different active layer thickness 有权
具有感测TGT的光学器件和具有不同有源层厚度的开关TFT

  • Patent Title: Optical device having sensing TGTs and switching TFTs with different active layer thickness
  • Patent Title (中): 具有感测TGT的光学器件和具有不同有源层厚度的开关TFT
  • Application No.: US09939634
    Application Date: 2001-08-28
  • Publication No.: US06570197B2
    Publication Date: 2003-05-27
  • Inventor: In-Su Joo
  • Applicant: In-Su Joo
  • Priority: KR00-51295 20000831
  • Main IPC: H01L2900
  • IPC: H01L2900
Optical device having sensing TGTs and switching TFTs with different active layer thickness
Abstract:
A thin film transistor optical detecting sensor includes an array substrate having a transparent substrate, a plurality of sensor thin film transistors disposed on the transparent substrate, each having a first silicon layer of a first thickness, a plurality of storage capacitors, each connected with a corresponding one of the plurality of sensor thin film transistors, storing charges of an optical current, and a plurality of switch thin film transistors, each having a second silicon layer of a second thickness less than the first thickness.
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