发明授权
- 专利标题: Interferometer
- 专利标题(中): 干涉仪
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申请号: US09719285申请日: 2001-03-05
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公开(公告)号: US06577400B1公开(公告)日: 2003-06-10
- 发明人: Renatus Gerardus Klaver
- 申请人: Renatus Gerardus Klaver
- 优先权: NL1009366 19980610
- 主分类号: G01B902
- IPC分类号: G01B902
摘要:
Interferometer for measuring a phase difference between a reference beam (37) and an object beam (36′) transformed by an optical element (10), comprising light source means (2), an optical device (3) and detection means (4) in a detection plane (34). The optical device (3) comprises a first light conductor (30) having a first output surface (31) that generates an object beam (36) having a spherical wave front and a second light conductor (32) having a second output surface (33) that generates a reference beam (37) having a spherical wave front, directed onto the detection plane (34), wherein the set-up of the first light conductor (30) and the optical element (10) is such that the transformed object beam (36′) interferes with the reference beam (37) in the detection plane (34).
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