发明授权
- 专利标题： Method of extracting parameters of diffusion model capable of extracting the parameters quickly
- 专利标题（中）： 提取能够快速提取参数的扩散模型参数的方法
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申请号： US09386304申请日： 1999-08-31
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公开(公告)号： US06577993B1公开(公告)日： 2003-06-10
- 发明人: Hironori Sakamoto
- 申请人： Hironori Sakamoto
- 优先权： JP10-245485 19980831
- 主分类号： G06F1750
- IPC分类号： G06F1750
摘要：
In a method of extracting parameters of a diffusion model from object parameters to be used in a process simulation of a semiconductor manufacturing process, classifying the object parameters into a first through an N-th (N being a natural integer not smaller than 2) groups, the first group being used for classifying thereinto the most fundamental physical and least model-dependent parameters, the N-th group being used for classifying thereinto the least fundamental physical and most model-dependent parameters, and extracting successively the classified parameters in the first through the N-th groups in the order from the first to the N-th group.
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