发明授权
- 专利标题: Processing methods of forming a capacitor, and capacitor construction
- 专利标题(中): 形成电容器和电容器结构的加工方法
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申请号: US09497935申请日: 2000-02-04
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公开(公告)号: US06580114B1公开(公告)日: 2003-06-17
- 发明人: Thomas M Graettinger , Paul J. Schuele , Pierre C. Fazan , Li Li , Zhiqiang Wu , Kunal R. Parekh , Thomas Arthur Figura
- 申请人: Thomas M Graettinger , Paul J. Schuele , Pierre C. Fazan , Li Li , Zhiqiang Wu , Kunal R. Parekh , Thomas Arthur Figura
- 主分类号: H01L27108
- IPC分类号: H01L27108
摘要:
Capacitors and methods of forming capacitors are described. According to one implementation, a capacitor opening is formed over a substrate node location. Electrically conductive material is subsequently formed within the capacitor opening and makes an electrical connection with the node location. A protuberant insulative structure is formed within the capacitor opening and includes a lateral outer surface at least a portion of which is supported by and extends elevationally below adjacent conductive material. First and second capacitor plates and a dielectric layer therebetween are formed within the capacitor opening and supported by the protuberant structure. In one aspect, the conductive material is formed to occupy less than all of the capacitor opening and to leave a void therewithin, with the protuberant structure substantially, if not completely filling in the void. In another aspect, the conductive material is formed to occupy less than all of the capacitor opening and to leave a void therewithin, with the protuberant structure only partially filling in the void to provide a tubular structure.
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