发明授权
US06588949B1 Method and apparatus for hermetically sealing photonic devices 有权
用于密封光子器件的方法和装置

  • 专利标题: Method and apparatus for hermetically sealing photonic devices
  • 专利标题(中): 用于密封光子器件的方法和装置
  • 申请号: US09224210
    申请日: 1998-12-30
  • 公开(公告)号: US06588949B1
    公开(公告)日: 2003-07-08
  • 发明人: Ping Zhou
  • 申请人: Ping Zhou
  • 主分类号: G02B636
  • IPC分类号: G02B636
Method and apparatus for hermetically sealing photonic devices
摘要:
A hermetically sealed photonic device submount includes a photonic device mounted on a substrate material and sealed in a flexible hermetic seal. In one configuration, the photonic device is configured to emit or to receive light through the substrate material. In this configuration, the photonic device is covered with an adhesive layer and a metal layer deposited onto the adhesive layer. In another configuration, the photonic device is configured to emit or to receive light in a direction substantially vertically upward from the substrate material. In this configuration, a cover is placed over the photonic device, then the cover is hermetically sealed to the substrate material with an adhesive layer and a metal layer depositd onto the adhesive layer. In both configurations, the photonic device submounts are hermetically sealed according to various aspects of the present invention on the substrate material without using a separate package. Accordingly, any number of hermetically sealed photonic device submounts can be mass produced on wafers using the present invention.
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