Invention Grant
- Patent Title: Partially crosslinked polymer for bilayer photoresist
- Patent Title (中): 用于双层光致抗蚀剂的部分交联聚合物
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Application No.: US09788181Application Date: 2001-02-15
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Publication No.: US06589707B2Publication Date: 2003-07-08
- Inventor: Geun Su Lee , Jae Chang Jung , Min Ho Jung , Ki Ho Baik
- Applicant: Geun Su Lee , Jae Chang Jung , Min Ho Jung , Ki Ho Baik
- Priority: KR2000-7853 20000218
- Main IPC: G03F7004
- IPC: G03F7004

Abstract:
The present invention provides photoresist monomers, photoresist polymers derived from the same, processes for producing such photoresist polymers, photoresist compositions comprising such polymers, and processes for producing a photoresist pattern using such photoresist compositions. In particular, photoresist monomers of the present invention comprise a moiety of Formula 4: where R1, R2, R3 and R4 are those defined herein. Photoresist polymers of the present invention have a relatively high etching resistance, and therefore are useful in a thin resist process and a bilayer photoresist process. Moreover, photoresist polymers of the present invention have a high contrast ratio between an exposed region and a non-exposed region.
Public/Granted literature
- US20010031420A1 Partially crosslinked polymer for bilayer photoresist Public/Granted day:2001-10-18
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