发明授权
US06590209B1 Technique to quantitatively measure magnetic properties of thin structures at <10 NM spatial resolution 失效
在<10 NM空间分辨率下定量测量薄结构的磁性能的技术

  • 专利标题: Technique to quantitatively measure magnetic properties of thin structures at <10 NM spatial resolution
  • 专利标题(中): 在<10 NM空间分辨率下定量测量薄结构的磁性能的技术
  • 申请号: US09516878
    申请日: 2000-03-01
  • 公开(公告)号: US06590209B1
    公开(公告)日: 2003-07-08
  • 发明人: Sasa Bajt
  • 申请人: Sasa Bajt
  • 主分类号: G01N2304
  • IPC分类号: G01N2304
Technique to quantitatively measure magnetic properties of thin structures at <10 NM spatial resolution
摘要:
A highly sensitive and high resolution magnetic microscope images magnetic properties quantitatively. Imaging is done with a modified transmission electron microscope that allows imaging of the sample in a zero magnetic field. Two images from closely spaced planes, one in focus and one slightly out of focus, are sufficient to calculate the absolute values of the phase change imparted to the electrons, and hence obtain the magnetization vector field distribution.
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