Invention Grant
US06590262B2 High voltage ESD protection device with very low snapback voltage
有权
具有极低回跳电压的高压ESD保护器件
- Patent Title: High voltage ESD protection device with very low snapback voltage
- Patent Title (中): 具有极低回跳电压的高压ESD保护器件
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Application No.: US10082729Application Date: 2002-02-26
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Publication No.: US06590262B2Publication Date: 2003-07-08
- Inventor: Jyh-Min Jiang , Kuo-Chio Liu , Jian-Hsing Lee , Ruey-Hsin Liu
- Applicant: Jyh-Min Jiang , Kuo-Chio Liu , Jian-Hsing Lee , Ruey-Hsin Liu
- Main IPC: H01L2701
- IPC: H01L2701

Abstract:
A device layout is disclosed for an ESD device for protecting NMOS high voltage transistors where the SCR protection device and the two NMOS transistors are integrated. The two NMOS transistors share an n-type doped drain (ndd) area which has implanted two n+ drains, one for each of the two transistors and a p+ diffusion separates the two n+ drains. Furthermore, the ndd area has implanted an n-well which extends from halfway under the first n+ drain to halfway under the second n+ drain. In addition, the depth of the n-well exceeds the depth of the ndd area. The added p+ diffusion together with the ndd area and the p-substrate of the silicon wafer create the parasitic pnp transistors of the SCR. The shared ndd area together with the n+ sources of the NMOS transistors creates the SCR's two parasitic npn transistors. The low triggering voltage of the SCR is achieved by the combination of the n-well, the ndd area, the p+diffusion between the two drains, and by having the two parasitic npn transistors paralleled.
Public/Granted literature
- US20020115250A1 Novel high voltage ESD protection device with very low snapback voltage Public/Granted day:2002-08-22
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