发明授权
- 专利标题: Semiconductor laser device and method for producing the same
- 专利标题(中): 半导体激光装置及其制造方法
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申请号: US09713175申请日: 2000-11-15
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公开(公告)号: US06590918B1公开(公告)日: 2003-07-08
- 发明人: Masaya Mannou , Toshiya Fukuhisa
- 申请人: Masaya Mannou , Toshiya Fukuhisa
- 优先权: JP11-327558 19991117
- 主分类号: H01S319
- IPC分类号: H01S319
摘要:
A method for producing a semiconductor laser element includes steps of: forming a semiconductor layered structure on a first conductivity type semiconductor substrate, the semiconductor layered structure including a first conductivity type cladding layer, a quantum well active layer, and a first cladding layer of a second conductivity type; forming a diffusion control layer in a predetermined region on the semiconductor layered structure; forming a material layer which acts as an impurity source on the diffusion control layer; and diffusing impurities by a first thermal treatment from the material layer through the diffusion control layer into at least a part of the semiconductor layered structure including at least a part of the quantum well active layer, thereby forming an impurity diffusion region, wherein a part of the quantum well active layer in at least one cavity end face is disordered by diffusion of the impurities.
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