The invention provides a method for efficiently producing, in a low temperature region, a thin film or micro-spherules of a single component type or a multi-component type metal oxide glass, wherein an organic metal compound is subjected to hydrolyzation in a reaction liquid consisting of water and an organic solvent, with halogen ions (F−, Cl−) as a catalyst in the presence of boron ions (B+), followed by dehydration and condensation, after which a reaction product is vitrified at a temperature of 200° C. or below, thereby obtaining the single component type or multi-component type metal oxide glass film (reaction at a pH value between 5.0 and 4.5), or micro-spherules (reaction at a pH value between 8 and 10). Transparent and homogeneous glass film or micro-spherules, which are excellent in the heat-resistance, moisture-resistance, insulating property, gas-barrier property, and ion-migration preventive property, can be obtained in a normal temperature region.