- 专利标题: Apparatus and method for scanning a surface
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申请号: US10124138申请日: 2002-04-16
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公开(公告)号: US06592036B2公开(公告)日: 2003-07-15
- 发明人: John W. Sadler , Andreas N. Dorsel , Kenneth L. Staton
- 申请人: John W. Sadler , Andreas N. Dorsel , Kenneth L. Staton
- 主分类号: G06K714
- IPC分类号: G06K714
摘要:
Apparatus and method for scanning a surface. An optical system generates a light beam to illuminate a surface. A carrier supports the surface for reciprocating motion with respect to the light beam to form one axis of a raster. A propulsion system moves the carrier at a substantially constant speed and a position sensor provides an output signal representing the surface position with respect to the light beam. A control system responsive to the output signal modulates a sample period reciprocally to carrier speed to achieve substantially constant scan length per sample and to control data acquisition timing.
公开/授权文献
- US20020109009A1 Apparatus and method for scanning a surface 公开/授权日:2002-08-15
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