发明授权
US06593158B1 Semiconductor memory and manufacturing method of the same 有权
半导体存储器及其制造方法相同

  • 专利标题: Semiconductor memory and manufacturing method of the same
  • 专利标题(中): 半导体存储器及其制造方法相同
  • 申请号: US09537432
    申请日: 2000-03-27
  • 公开(公告)号: US06593158B1
    公开(公告)日: 2003-07-15
  • 发明人: Satoshi Takahashi
  • 申请人: Satoshi Takahashi
  • 优先权: JP11-217932 19990730
  • 主分类号: H01L21266
  • IPC分类号: H01L21266
Semiconductor memory and manufacturing method of the same
摘要:
A semiconductor memory comprises a first cell (memory cell) including a charge storage layer, and a second cell including a charge storage layer and used with its set threshold value fixed. The threshold value of the second cell is generally apt to return to the initial state, i.e., initial threshold value, when damaged by baking. So, the initial threshold value is shifted to approach the threshold value to be set, as closely as possible. The data retention characteristic of the second cell (reference cell, redundancy memory cell, or OTP region cell) formed into the same construction in the same process as the first cell, can be considerably improved without unnecessarily increasing steps of manufacturing process.
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