发明授权
- 专利标题: Thin film magnetic head slider and electrostatic actuator for driving a head element thereof
- 专利标题(中): 薄膜磁头滑块和用于驱动其头元件的静电致动器
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申请号: US09670748申请日: 2000-09-27
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公开(公告)号: US06594119B1公开(公告)日: 2003-07-15
- 发明人: Takao Koshikawa , Hiroshi Maeda , Takahiro Imamura
- 申请人: Takao Koshikawa , Hiroshi Maeda , Takahiro Imamura
- 优先权: JP7-041574 19950301; JP7-236910 19950914
- 主分类号: G11B2124
- IPC分类号: G11B2124
摘要:
A thin film magnetic head has a media opposing surface which is adapted to be opposed to a recording medium, and includes a sacrificial layer, on a substratum that has a surface for forming the media opposing surface having at least one rail. A tracking mechanism or loading/unloading mechanism can be provided on the slider. An electrostatic actuator suitable for driving such a mechanism includes a stationary section having a plurality of teeth parallel to each other, a movable section having a plurality of teeth parallel to the teeth of the stationary section, a support spring for supporting the movable section so that the movable section can be moved with respect to the stationary section in the tooth width direction. A drive force generator moves the movable section to a position at which an electrostatic attraction force in the tooth width direction generated when a voltage is impresses between the teeth of the stationary section and those of the movable section, is balanced with the elastic force of the head suspension.
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