发明授权
- 专利标题: Method of making masks and electronic parts
- 专利标题(中): 制作口罩和电子零件的方法
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申请号: US09503095申请日: 2000-02-11
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公开(公告)号: US06596469B2公开(公告)日: 2003-07-22
- 发明人: Christopher David McCullough , Kevin Barry Ray , Alan Stanley Victor Monk , John David Riches , Anthony Paul Kitson , Gareth Rhodri Parsons , David Stephen Riley , Peter Andrew Reath Bennett , Richard David Hoare
- 申请人: Christopher David McCullough , Kevin Barry Ray , Alan Stanley Victor Monk , John David Riches , Anthony Paul Kitson , Gareth Rhodri Parsons , David Stephen Riley , Peter Andrew Reath Bennett , Richard David Hoare
- 优先权: GB9717120 19970814; GB9722861 19971029; GB9809346 19980501
- 主分类号: G03C176
- IPC分类号: G03C176
摘要:
A method of making a mask or an electronic part, for example a printed circuit, comprises the steps of delivering heat in a desired pattern to a precursor of the mask or electronic part, the precursor comprising a surface coated with a coating, the coating comprising a heat-sensitive composition itself comprising an aqueous developer soluble polymeric substance and a compound which reduces the aqueous developer solubility of the polymeric substance, wherein the aqueous developer solubility of the composition is not increased by incident UV radiation but is increased by the delivery of heat; then developing the precursor to remove the heat-sensitive composition in regions to which the heat was delivered. In the case of a printed circuit precursor the surface may be then etched in conventional manner to yield the required printed circuit.
公开/授权文献
- US20020136961A1 Method of making masks and electronic parts 公开/授权日:2002-09-26
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