发明授权
- 专利标题: Low-staining adhesive sheets and method for removing resist material
- 专利标题(中): 低污染粘合片和去除抗蚀材料的方法
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申请号: US09590131申请日: 2000-06-09
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公开(公告)号: US06602599B1公开(公告)日: 2003-08-05
- 发明人: Eiji Toyoda , Makoto Namikawa , Yoshio Terada
- 申请人: Eiji Toyoda , Makoto Namikawa , Yoshio Terada
- 优先权: JP11-163857 19990610; JP11-367785 19991224; JP2000-011094 20000120
- 主分类号: B32B2730
- IPC分类号: B32B2730
摘要:
A low-staining adhesive sheet provided with an adhesive layer containing as the main component a pressure-sensitive adhesive polymer on a base film, wherein the pressure-sensitive adhesive polymer is substantially free from oligomeric low-molecular weight matters; and a method for removing a resist material by using this low-staining adhesive sheet. This low-staining adhesive sheet gives no organic staining matters remaining on the surface of article (for example, substrate) to be used as an adherend and is useful in removing a resist material and foreign matters, and re-peeling surface-protectors, masking materials, and other materials.
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