- 专利标题: Polymer, resist composition and patterning process
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申请号: US10307996申请日: 2002-12-03
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公开(公告)号: US06605678B2公开(公告)日: 2003-08-12
- 发明人: Tsunehiro Nishi , Mutsuo Nakashima , Tomohiro Kobayashi
- 申请人: Tsunehiro Nishi , Mutsuo Nakashima , Tomohiro Kobayashi
- 优先权: JP2000-368628 20001204
- 主分类号: C08F12400
- IPC分类号: C08F12400
摘要:
A polymer comprising recurring units of formula (1-1) or (1-2) wherein R1, R2, R3 and R4 are H or C1-15 alkyl, R1 and R2, and R3 and R4, taken together, may form a ring; R5 and R6 are H, C1-15 alkyl, acyl or alkylsulfonyl groups or C2-15 alkoxycarbonyl or alkoxyalkyl groups which may have halogen substituents; and k=0 or 1, and having a Mw of 1,000-500,000 is novel. A resist composition comprising the polymer as a base resin is sensitive to high-energy radiation, has excellent sensitivity, resolution, etching resistance, and minimized swell and lends itself to micropatterning with electron beams or deep-UV.
公开/授权文献
- US20030120009A1 Polymer, resist composition and patterning process 公开/授权日:2003-06-26
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